摘要
Anovelfabricationprocessformicropatternswithcurvaturewasintroduced.Thecurvedstructuresweremadebycompensatingrectangularmicrostructureswithliquidphotoresistlayer.Becauseofthesurfacetensionoftheliquidinmicroscale,variousshapesofmeniscuscanbemadeonthemicrochannels.Themicrochannelsweremadeonthesiliconsubstrateinadvance,andthentheliquidlayerwascoatedonthemicrochannels.Fromthenatureofliquidbehavior,thecurvedpatternswithsmoothsurfaceareobtained,whichcannotbemadeeasilywiththeconventionalmechanicalmachining,aswellaswiththemicrofabricationprocesses,suchaswetanddryetching.Withthisprinciple,itisexpectedthatthesmoothandcurvedsurfacescanbemadebysimpleprocessesandtheresultscanbeappliedwidely,suchasopticalpatterns.
出版日期
2011年05月17日（中国期刊网平台首次上网日期，不代表论文的发表时间）
