简介:Awhole-field3Dsurfacemeasurementsystemforsemiconductorwaferinspectionisdescribed.Thesystemconsistsofanopticalfiberplate,whichcansplitthelightbeamintoN2subbeamstorealizethewhole-fieldinspection.Aspecialprismisusedtoseparatetheilluminationlightandsignallight.Thissetupischaracterizedbyhighprecision,highspeedandsimplestructure.
简介:Thetomographytechniqueiscommonlyusedforthereconstructionofholographicinterferometry.However,thecurrentreconstructionmethoddoesn'tconsiderthemeasurementerrorswhicharenon-avoidableinthemeasurementandwilldegradethereconstructionquality.Thefactorsaffectingthereconstructionqualityareanalyzedandthedistributionlawofthereconstructionerrorwithexperimentalerrorsisdiscussed.Finally,amethodtoimprovethereconstructionquality—theKalmanfiltermethodispresented.
简介:LinearPhaseFIRFilteronMeasuring3-DSurface①WANGYunshan,YANGFujun,LIWei(ShandongUniversityofTechnology,Jinan250061,CHN)Abstract...
简介:Inthispaperweproposeathreedimensionalmultiplierlessdiscretecosinetransform(DCT)withliftingschemecalled3D-binDCT.Basedon3D-binDCT,anovelvideocodingalgorithmwithoutmotionestimation/compensationisproposed.Itusesthe3D-binDCTtoexploitspatialortemporalredundancy.ThecomputationofbinDCTonlyneedsshiftandadditionoperations,thusthecomputationalcomplexityisminimized.DCcoefficientprediction,modifiedscanmodeandarithmeticcodingtechniquesarealsoadopted.Extensivesimulationresultsshowthattheproposedcodingschemeprovideshighercodingefficiencyandimprovesvisualquality,anditiseasytoberealizedbysoftwareandhardware.
简介:Theclosephotogrammetric3-Dcoordinatemeasurementisanewmeasuringtechnologyinthefieldsofthecoordinatemeasurementmachine(CMM)inrecentyears.Inthismethod,weusuallyplacesometargetsonthemeasuredobjectandtakeimageoftargetstodeterminetheobjectcoordinate.Thesubpixellocationoftargetimageplaysanimportantroleinhighaccuracy3-Dcoordinatemeasuringprocedure.Inthispaper,somesubpixellocationmethodsarereviewedandsomefactorswhichaffectlocationprecisionareanalyzed.Thenweproposebilinearinterpolationcentroidalgorithm.Theexperimentshaveshownthisalgorithmcanimproveaccuracyoftargetcentroidbyincreasingavailablepixels.
简介:Byusingthecenterprojectionimagesequencetoestimate3-Dmotionparameters,oneneedstoknowthecorrespondingrelationshipbetweenthefeatureofmotionobjectinspaceandtheprojectioncoordinateonimageplane.Inordertoavoidusingtherelationshipoffeaturecorrespondence,thetensoranalysismethodintheaffinetransformationsystemispresented,andthesimulationdataofexperimentalresultsaregiven.
简介:Micro-structures3-Dprofilemeasurementisanimportantmeasurementcontentforresearchonmicro-machiningandcharacterizationofmicro-dimension.Inthispaper,anewmethodinvolved2-Dstructuretemplate,whichguidesphaseunwrapping,isproposedbasedonphase-shiftingmicroscopicinterferometry.Itisfitnotonlyforstaticmeasurement,butalsofordynamicmeasurement,especiallyformotionofMEMSdevices.3-Dprofileofactivecombofmicro-resonatorisobtainedbyusingthemethod.Thetheoreticprecisioninout-of-planedirectionisbetterthan0.5nm.Thein-planetheoreticprecisioninmicro-structuresisbetterthan0.5μm.Butattheedgeofmicro-structures,itisonthelevelofmicrometermainlycausedbyimpreciseedgeanalysis.Finally,itsdisadvantagesandthefollowingdevelopmentarediscussed.
简介:Parameterquantificationprincipleofthree-dimensional(3-D)fluorescentspectrumanditsrealizationtechniquearestudied.Thepotablefiberopticfluorescentmeasurerformineraloilisgiven.Threeparametersoftheexcitinglightwavelength.theeavelengthandtheintensityofthefluorescentlightexcitedbythemeasuredoilareexpressedwith3-Dcoordinatesandareprocessedsoastobesampledagainandtobecurvefitted.