简介:Moleculardynamics(MD)simulationswereperformedtoinvestigateF+continuouslybombardingSiCsurfaceswithenergiesof100eVatdifferentincidentanglesat300K.Thesimulatedresultsshowthatthesteady-stateuptakeofFatomsincreaseswithincreasingincidentangle.Withthesteady-stateetchingestablished,aSi-C-Freactivelayerisformed.ItisfoundthattheetchingyieldofSiisgreaterthanthatofC.IntheF-containingreactionlayer,theSiFspeciesisdominantwithincidentangleslessthan30o.Forallincidentangles,theCFspeciesisdominantoverCF2andCF3.
简介:ThisworkinvestigatedC2F6/O2/ArplasmachemistryanditseffectontheetchingcharacteristicsofSiCOHlow-kdielectricsin60MHz/2MHzdual-frequencycapacitivelycoupleddischarge.FortheC2F6/Arplasma,theincreaseinthelow-frequency(LF)powerledtoanincreasedionimpact,promptingthedissociationofC2F6withhigherreactionenergy.Asaresult,fluorocarbonradicalswithahighF/Cratiodecreased.Theincreaseinthedischargepressureledtoadecreaseintheelectrontemperature,resultinginthedecreaseofC2F6dissociation.FortheC2F6/O2/Arplasma,theincreaseintheLFpowerpromptedthereactionbetweenO2andC2F6,resultingintheeliminationofCF3andCF2radicals,andtheproductionofanF-richplasmaenvironment.TheF-richplasmaimprovedtheetchingcharacteristicsofSiCOHlow-kfilms,leadingtoahighetchingrateandasmoothetchedsurface.
简介:介绍了利用北京同步辐射实验室的全反射X射线荧光谱仪测量生物细胞样品的可行性。并用此谱仪测量了正常的和辐照的小白鼠小肠细胞的痕量元素含量,发现K、Ca、Fe等元素含量有明显的提高,Cu元素含量明显降低,Mn元素含量变化不大,Zn元素含量基本稳定,并讨论了其在临床医学上的重要价值。
简介:通过同步辐射扩展X射线吸收精细结构(SREXAFS)研究As超富集植物大叶井口边草(PteriscreticaL.)中As的化学形态及其在植物体中的转化。结果表明,在大叶井口边草中As主要与0配位,根部存在与GSH结合的As,但是在叶片中没有发现与GSH结合的As。在As(1lI)和As(V)处理中,植物根系的As分别以As(III)和As(V)为主,但是在叶柄和叶片中As都以As(III)的形态为主。植物根系吸收的As(v)在向上转运的过程中具有向As(III)转化的趋势,其转化过程主要发生在根部。实验证明,As-GSH并不是大叶井口边草中砷解毒的主要机理,超富集植物可能具有与一般耐性植物不同的重金属解毒机制。