简介:研究表明含氟气体的性质决定了原子氟(F)的转化效率,通常在CxFy气体中x的值越大,氟(F)的转化效率也就会越高。所以C3F8(八氟丙烷)比C2F6(乙氟烷)具有更高的利用效率,更少的PFC(全氟化物)的排放。文章主要研究在以四乙氧基硅烷(TOES)为基础的离子增强化学气相沉积(PlasmaEnhancedChemicalVaporDeposition,PECVD)的清洗制程中,利用分解效率高的C3F8气体取代C2F6气体。通过实验设计(DesignOfExperiment,DOE),调整腔体压力、射频(RF)功率、气体流量等参数,最终得到最优化的新清洗配方。应用到实际的量产中,有效地降低了成本,减少了PFC的排放。
简介:Thefluorineionsensitivefield-effecttransistor(F--ISFET)ismadebydepositingverythinLaF3filmongridoffield-effecttransistorwithsputtermethod.Theoperatingprinciple,measuringmethodandmeasuredresultsofF--ISFETaregiven.Themeasuredresultsshowthatthiskindofsensorhashighersensitivity,shorterresponsetimeandbetterlinearity.Onthebasisofexperimentalresults,thefactorofinfluencingthesteadinessandrepeatabilityofF--ISFETareconjectured.
简介:TheconceptofF-knowledgeispresentedbyemployingS-roughsets.ByengraftingandpenetratingbetweentheF-knowledgegeneratedbyS-roughsetsandtheRSAalgorithm,thesecuritytransmissionandrecognitionofmulti-agentF-knowledgeareproposed,whichincludesthesecuritytransmissionofmulti-agentF-knowledgewithpositivedirectionsecretkeyandthesecuritytransmissionofmulti-agentF-knowledgewithreversedirectionsecretkey.Finally,therecognitioncriterionandtheapplicationsofF-knowledgearepresented.ThesecurityofF-knowledgeisanewapplicationresearchdirectionofS-roughsetsininformationsystems.
简介:Basedonthewhiteningpropertyofwavelettransformationfor1/fnoise,thispaperaddressestheproblemofdetectingdeterministicsignalsinthepresenceof1/ffractalnoise.Thetransferfunctionofwhiteningfilterisprovidedaswellastheconditionforwhitening.ThereceiverstructurebasedonKarhunen-Loeveexpansionandthedecisionrulearealsogiven.Finallyperformanceofthedetectorisanalyzed.
简介:Byusingtwo-directionalS-roughsets,theconceptsof(f,f)-interferencegenerationand(f,f)-inter-ferencelawgenerationofknowledge,F-interferencegenerationandF-interferencelawgenerationoftwo-directionalS-roughsetsareproposed.Basedontheconceptsabove,therelationtheoremsbetweenF-interferencelossandF-interferencedegree,therelationtheoremsbetweenF-interferencelosslawandF-interferencedegreelaw,thediscernibilitytheoremsbetweenF-interferenceandF-interferencelawarepresented.Atlast,therecognitioncriterionofF-interferencelawanditsapplicationaregiven.
简介:TheproblemsofcharacteristicpolynomialassignmentinFomasini-Marchesini(F-M)modelⅡof2-Dsystemsareinvestigated.Thecorrespondingclosed-loopsystemsdescribedbyF-MmodelIIareobtainedviathestatefeedback.Usingthealgebraicgeometrymethod,thecharacteristicpolynomialassignmentinthedosed-loopsystemsisdiscussed.Intermsofthetheoryofalgebraicgeometry,theproblemofcharacteristicpolynomialassignmentistransferredtotheonewhetherarationalmappingisonto.SufficientconditionsforalmostarbitraryassignmentcoefficientsofcharacteristicpolynomialinF-MmodelⅡof2-Dsystemsviastatefeedbackarederived,andtheyareavailableformulti-inputcases.Italsohasbeenshownthatthismethodcanbeappliedtoassignthecharacteristicpolynomialwithoutputfeedback.Thesufficientconditionsforalmostarbitraryassignmentcoefficientsofcharacteristicpolynomialofmulti-input2-DsystemsdescribedbyF-MmodelⅡwithoutputfeedbackareestablished.
简介:Inthelaserwarningsystem,anon-mechanicalscanningFabry-Perot(F-P)typelaserwarningmethodanditscrucialcomponent-laserincidentsensordesignmethodarebroughtout,andtheF-Petalonwiththeinterferometricfiltercombinationisadopted.Fortheincidentlaserpulsewithacertainwavelength,thetransmittancedifferenceoftheinterferometricfiltersisindependentwithpolarizationofincidentlight,anddescendsalmostlinearlyastheincidentanglegetswider.Alaserincidentanglesensorexperimentalplatformisbuiltup,andtheexperimentiscarriedoutwithagivenlaserrangefinder.Astheresultsindicate,whentheincidentangleislessthan5o,thetransmittancedifferencemeasuredbythelaseranglesensorissignificantlylower,andthedeviationismorethan10%.Whiletheincidentangleisgreaterthan10o,thedeviationisreducedsignificantly.