简介:Theopticalparametersforthreesamplesofintrinsic,dopedSianddopedMg(AlxGa1-x)yIn1-yPpreparedbytheMOCVDonGaAssubstrateweremeasuredbyusingellipsometryandwerecalculatedbythetwo-layerabsorptionfilmmodel.Theresultsobtainedwerediscussed.Thegrownratesandthicknessofoxidiclayerontheintrinsic(AlxGa1-x)yIn1-yPsurfaceexposedintheatmospherewerestudied.Alineardependenceofoxidiclayerthicknessonthetimewasobtained.