Investigation of dislocations in 8° off-axis 4H-SiC epilayer

(整期优先)网络出版时间:2010-07-17
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Thispaperreportsthattheetchingmorphologyofdislocationsin8°off-axis4H-SiCepilayerisobservedbyusingascanningelectronicmicroscope.Itisfoundthatdifferenttypesofdislocationscorrespondwithdifferentdensitiesandbasalplanedislcation(BPD)arrayandthreadingedgedislocation(TED)pileupgroupliealongsomecertaincrystaldirectionsintheepilayer.Itisconcludedthattheelasticenergyofthreadingscrewdislocations(TSDs)ishighestandTEDsislowestamongthesedislocations,sothedensityofTSDsislowerthanTEDs.TheBPDscanconverttoTEDsbutTSDscanonlypropagateintotheepilyerinspiteofthehigherelasticenergythanTEDs.ThereasonoftheformofBPDsarrayinepilayeristhatthebigstepalongthebasalplanecausedbyfacedefectsblockedtheupstreamatoms,andTEDspileupgroupisthatthedislocationsslideisblockedbydislocationgroupsinepilayer.