Ahybridcontrolplatformisinvestigatedinthispapertomitigatemicrovibrationstoagroupofvibrationsensitiveequipmentinstalledinamicroelectronicsfacilitysubjecttonearbyroadvehicle-inducedhorizontalandverticalgroundmotions.Thehybridcontrolplatform,onwhichmicroelectronicsequipmentisinstalled,ismountedonabuildingfloorthroughaseriesofpassivemountsandcontrolledbyhydraulicactuatorsinbothhorizontalandverticaldirections.Thecontrolplatformisanelasticbodywithsignificantbendingmodesofvibration,andasub-optimalcontrolalgorithmisusedtomanipulatethehydraulicactuatorswithactuatordynamicsincluded.Thefiniteelementmodelandtheequationsofmotionofthecoupledplatform-buildingsystemarethenestablishedintheabsolutecoordinatetofacilitatethefeedbackcontrolandperformanceevaluationoftheplatform.Thehorizontalandverticalgroundvibrationsatthebaseofthebuildinginducedbynearbymovingroadvehiclesareassumedtobestationaryrandomprocesses.Atypicalthree-storymicroelectronicsbuildingisselectedasacasestudy.Thecasestudyshowsthattheverticalvibrationofthemicroelectronicsbuildingishigherthanthehorizontal.TheuseofahybridcontrolplatformcaneffectivelyreducebothhorizontalandverticalmicrovibrationsofthemicroelectronicsequipmenttothelevelwhichsatisfiesthestringentmicroscalevelocityrequirementspecifiedintheBoltBeranek&Newman(BBN)criteria.
