ASINGLE-CRYSTALSILICONSYMMETRICALANDDECOUPLEDGYROSCOPEONINSULATINGSUBSTRATE；ALMINIUMNITRIDEBASEDTHINFILMBULKACOUSTICRESONATORUSINGGERMANIUMSACRIFICIALLAYERETCHING；AlterationofPoisson'sratioinhighcouplingpiezoelectrics；Capacitancecouplingmicromechanicalfilter；Coupled,macro-micromodelingforhotdeformationandsintering……
