Read—out of a read—only super—resolution optical disc with a Si mask

(整期优先)网络出版时间:2002-10-20
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Anovelread-onlysuper-resolutionopticaldiscstructure(substrate/masklayer/dielectriclayer)ispropsedinthispaper.ByusingaSithinfilmasthemasklayer,therecordingpitswithadiameter380nmandadepth50nmarereadoutonthedynamicmeasuringequipment;thelaserwavelengthλis632.8nmandthenumericalapertureis0.40.IntheoftheSithinfilmis18nmandthesignal-to-noiseratiois32dB.