Read—out of a read—only super—resolution optical disc with a Si mask-中国期刊网

首页 > 《中国物理B：英文版》 > 2002年10期 > Read—out of a read—only super—resolution optical disc with a Si mask

（整期优先）网络出版时间：2002-10-20

作者: 魏劲松;阮昊;等

/ 1

Anovelread-onlysuper-resolutionopticaldiscstructure(substrate/masklayer/dielectriclayer)ispropsedinthispaper.ByusingaSithinfilmasthemasklayer,therecordingpitswithadiameter380nmandadepth50nmarereadoutonthedynamicmeasuringequipment;thelaserwavelengthλis632.8nmandthenumericalapertureis0.40.IntheoftheSithinfilmis18nmandthesignal-to-noiseratiois32dB.

同系列内容