Anovelread-onlysuper-resolutionopticaldiscstructure(substrate/masklayer/dielectriclayer)ispropsedinthispaper.ByusingaSithinfilmasthemasklayer,therecordingpitswithadiameter380nmandadepth50nmarereadoutonthedynamicmeasuringequipment;thelaserwavelengthλis632.8nmandthenumericalapertureis0.40.IntheoftheSithinfilmis18nmandthesignal-to-noiseratiois32dB.