Anew128×128elementPtSiSchottkybarrierinfraredimagesen-sorwithITCCDreadortstructureandPtSithinfilmopticalcavitydetectorstruc-turehasbeenfabricated,whichhas50цm×50цmpixels,afillfactorof40per-cent,thenonuniformityof5%orlessandthedynamicrangeofoverorequalto50dB.Thenoiseequivalenttemperaturedifferenceis0.2Kwithf/1.0opticsat300Kbackground.Inthispaper,theprincipleofoperation,designconsiderationandfabric-cationtechnologyforthedevicearedescribed.
