Cu-andCo-substitutedNiZnferritethinfilms,Ni0.4-xZn0.6CuxFe2O4andNi0.5Zn0.5CoxFe2-xO4(0≤x≤0.2),aresynthesizedbysol-gelprocess.ThecrystallographicandmagneticpropertiesofCu-andCo-substitutedNiZnferritethinfilmshavebeeninvestigated.ThelatticeparameterdecreaseswithCusubstitutionandincreaseswithCosubstitution.ThesaturationmagnetizationdecreasesandthecoercivityincreaseswiththeincreaseofCusubstitution.Moreover,thesaturationmagnetizationgraduallyincreaseswiththeincreaseofCosubstitutionwhenx≤0.10,butdecreaseswhenx>0.10.Meanwhile,thecoercivityinitiallydecreaseswiththeincreaseofCosubstitutionwhenx≤0.10,butincreaseswhenx>0.10.