摘要
Thereisatradeoffbetweenthequantumefficiencyandthespectralresponselinewidthinresonant-cavityenhanced(RCE)photodetectors.Recentlyanewtypeofphotodetectorstructurehasbeenproposed,whichutilizesaninclinedmirrorinathree-mirrorcavity.Itdecouplesthequantumefficiencyandthespectralresponselinewidthandhashighresponsespeed,highquantumefficiency,andnarrowlinewidthsimultaneously.Theanalysisresultindicatesthatthelinewidthof0.8nmandquantumefficiencyhigherthan70%canbeachievedonthisdevice.Fora30×30μm2device,themaximumbandwidthapproaches23GHz.
出版日期
2005年01月11日（中国期刊网平台首次上网日期，不代表论文的发表时间）
