Investigation of the factors affecting the limit of detection of laser-induced breakdown spectroscopy for surface inspection

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摘要 Laser-inducedbreakdownspectroscopy(LIBS)wasexaminedtodetectatracesubstanceadheredontoAlalloysforthesurfaceinspectionofmaterialstobeadhesivelybonded.AsanexampleofSicontamination,siliconeoilwasemployedandsprayedontosubstrateswithacontrolledsurfaceconcentration.LIBSmeasurementsemployingnanosecondUVpulses(λ=266nm)andanoff-axisemissioncollectionsystemwithdifferentdetectingheightswereperformed.Becausesurfacecontaminantsareinvolvedintheplasmaformedbylaserablationofthesubstrates,therelativecontributionofthesurfacecontaminantsandthesubstratestotheplasmaemissioncouldbechangeddependingontheconditionsforplasmaformation.Thelimitofdetection(LOD)wasevaluatedunderseveraldetectingconditionsforinvestigatingthefactorsthataffectedtheLOD.Asignificantfactorwasthestandarddeviationvaluesofsignalintensitiesobtainedforthecleansubstrates.Thisvaluevarieddependingonthemeasurementconditions.FortheAlalloy(A6061),thesmallestLODobtainedwas0.529μg·cm^-2.Furthermore,animprovedLOD(0.299μg·cm^-2)wasobtainedfortheAlalloywithalowerSicontent.
机构地区 不详
出版日期 2019年03月13日(中国期刊网平台首次上网日期,不代表论文的发表时间)
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