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Fast and accurate measurement of large optical surfaces before polishing using a laser tracker

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摘要 Wepresentamethodthataccuratelymeasureslargeopticalsurfacesbeforepolishingusingalasertracker.Usingthescanningmodeofthelasertrackerconsiderablyimprovesmeasurementefficiencyandminimizesthedominanterrorscausedbyenvironmentalchange.WeusethismethodtomeasureaΦ1.3-masphericmirrorandobtainameasurementuncertaintyof0.72μm(rootmeansquare,RMS).

DOI rj8o6mprd0/1267558

作者李杰;吴时彬

机构地区不详

出处《中国光学快报：英文版》 2013年9期

关键词激光跟踪仪测量效率表面抛光光学非球面反射镜测量不确定度

分类 [机械工程][光学工程]

出版日期 2013年09月19日（中国期刊网平台首次上网日期，不代表论文的发表时间）

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来源期刊

中国光学快报：英文版

中国光学快报：英文版

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相关关键词

激光跟踪仪测量效率表面抛光光学非球面反射镜测量不确定度

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