简介:研究表明含氟气体的性质决定了原子氟(F)的转化效率,通常在CxFy气体中x的值越大,氟(F)的转化效率也就会越高。所以C3F8(八氟丙烷)比C2F6(乙氟烷)具有更高的利用效率,更少的PFC(全氟化物)的排放。文章主要研究在以四乙氧基硅烷(TOES)为基础的离子增强化学气相沉积(PlasmaEnhancedChemicalVaporDeposition,PECVD)的清洗制程中,利用分解效率高的C3F8气体取代C2F6气体。通过实验设计(DesignOfExperiment,DOE),调整腔体压力、射频(RF)功率、气体流量等参数,最终得到最优化的新清洗配方。应用到实际的量产中,有效地降低了成本,减少了PFC的排放。
简介:现公布《中华人民共和国保守国家秘密法实施条例》,自2014年3月1日起施行。
简介:Greatearthquakesoftenoccuralongornearactivefaultbelts.Thus,monitoringandresearchonfaultdeformationarequiteimportant.Methodssuchasshort-leveling,shortbaselineandintegratedmonitoringprofileacrossfaultbeltshavebeenusedtomonitorfaultactivitiesformanyyears.GNSSobservationsaremainlyusedtoobtainthehorizontalvelocityfieldinlargeareasandtostudytheactivitiesanddeformationofmajorblocks.GNSStechnologyhasbeenusedtomonitorandstudythedeformationoffaultsfromadifferentaspects.Inthispaper,someapplicationsandnewexplorationsofGNSSarediscussed.Theyare:(1)Researchandmonitoringofstrike-slipactivitiesoffaultswithGNSS.(2)ResearchandmonitoringofverticalactivitiesoffaultswithGNSS.(3)Investigatingthelawsofdeformationofblocksonthesidesoffaultzoneandsettingupstrainmodelstodeducetheactivitiesanddeformationoffaultswithrespectivemodelsandcomparethededucedresultswiththeactualmeasurementsacrossfault.Itisconcludedthatalargerdiscrepancybetweenthededucedandtheobserveddeformationindicatesastrongerinteractionbetweentheblocks,whichcanbeimportantforpredictingthelocationofastrongearthquakeandassessingseismichazard,aswellastheseismicitytrend.
简介:Thereisagrowingsupportforthelowlyingscalarmesonsf0(500),f0(980),a0(980),and(800)tobegenerateddynamicallyfromtheinteractionofpseudoscalarmesons,whilethecaseofthenextsetofscalarresonancesathigherenergies,f0(1370),f0(1710),K0(1430)ismoreaquestionofdebate.Soisthecaseofthetensorresonancesf2(1270),f′2(1525),K2(1430).AnewperspectiveonthesestateshasbeenofferedinRef.[1]wherethef0(1370)andf2(1270)resonancesareshowntobegeneratedfromtheinteractionprovidedbythelocalhiddengaugeLagrangiansimplementingunitarization.Itisshownthattheideaofthenatureofthesestatesasvectormeson-vectormesoncompositestateshasbeentestedinmanyreactions.Yet,thepermanentdiscussionoftheissuedemandsextrachecksforotherobservablesand,inthissense,theweakdecaysbringanewsourceofvaluableinformationthatshouldservetotestdifferentmodels.
简介:InthispaperthemethodofcombiningtheBursamodeltointegrateseveralregionaltimeseriestoderiveaunifiedglobaltimeseriesisintroducedindetail.Then,anexampletakenfromCMONOC(CrustalMovementObservationNetworkofChina)isusedtotestifthecombinationmethodisfeasible.Theprecisionoftheintegratedtimeserieswiththecombinationmethodisbelow2mm(North),3mm(East),thatissameastheresultsfromthedirectintegrationofthetimeseriesandtheprecisionofthebaselineisbelow6mm,whichprovesthatthecombinationmethodcanbeusedtointegrateseveralregionaltimeseriestoderiveaunifiedglobaltimeseries.