简介:ThethermodynamicphasestabilityareadiagramsofBCl3-NH3-SiCl4-H2-ArsystemwereplottedviaFactsagesoftwaretopredictthekineticexperimentalresults.Theeffectsofparameters(ie,partialpressureofreactants,depositiontemperatureandtotalpressure)onthedistributionregionsofsolidphaseproductswereanalyzedbasedonthediagrams.Theresultsshowthat:(a)Solidphaseproductsaremainlyaffectedbydepositiontemperature.TheareaofBN+Si3N4phaseincreaseswiththetemperaturerisingfrom650to900℃,anddecreaseswiththetemperaturerisingfrom900to1200℃;(b)Whentemperatureandtotalpressureareconstants,BN+Si3N4phaseexistsatahighpartialpressureofNH3;(c)Theeffectoftotalsystempressureiscorrelatedtodepositiontemperature.Thetemperaturerangingfrom700to900℃underlowtotalpressureistheoptimumconditionforthedeposition.(d)Appropriatekineticparameterscanbedeterminedbasedontheresultsofthermodynamiccalculation.Si–B–Ncoatingisobtainedvialowpressurechemicalvapordeposition.TheanalysisbyX-rayphotoelectronspectroscopyindicatesthatB–NandSi–Narethemainchemicalbondsofthecoating.