简介:ThepreparationofPT/PEK-cfilmsisreportedaswellastheirdielectricandopticalproperties.Thec-axisorientationratioofthefilmsis68%.Dielectricconstantandlossfactorat10kHzisabout4.023F/mand0.003,respectively.Therefractiveindicesofthefilms,neandno,are1.6573and1.6278at0.63μmwavelength,respectively.Theopticalband-gapofthefilmwithathicknessof2.33μmisfoundtobe3.06eV
简介:研究表明含氟气体的性质决定了原子氟(F)的转化效率,通常在CxFy气体中x的值越大,氟(F)的转化效率也就会越高。所以C3F8(八氟丙烷)比C2F6(乙氟烷)具有更高的利用效率,更少的PFC(全氟化物)的排放。文章主要研究在以四乙氧基硅烷(TOES)为基础的离子增强化学气相沉积(PlasmaEnhancedChemicalVaporDeposition,PECVD)的清洗制程中,利用分解效率高的C3F8气体取代C2F6气体。通过实验设计(DesignOfExperiment,DOE),调整腔体压力、射频(RF)功率、气体流量等参数,最终得到最优化的新清洗配方。应用到实际的量产中,有效地降低了成本,减少了PFC的排放。
简介:Dempster-Shaferevidencetheory(DStheory)iswidelyusedinbrainmagneticresonanceimaging(MRI)segmentation,duetoitsefficientcombinationoftheevidencefromdifferentsources.Inthispaper,animprovedMRIsegmentationmethod,whichisbasedonfuzzyc-means(FCM)andDStheory,isproposed.Firstly,theaveragefusionmethodisusedtoreducetheuncertaintyandtheconflictinformationinthepictures.Then,theneighborhoodinformationandthedifferentinfluencesofspatiallocationofneighborhoodpixelsaretakenintoconsiderationtohandlethespatialinformation.Finally,thesegmentationandthesensordatafusionareachievedbyusingtheDStheory.ThesimulatedimagesandtheMRIimagesillustratethatourproposedmethodismoreeffectiveinimagesegmentation.