简介：Synchrontronradiationx-rayreflectivitymeasurementisusedtostudytheconcentrationprofileofaδ-dopedErlayerinSiepitaxialfilmgrownbymolecular-beamepitaxy.Theoscillationofthereflectivityamplitudeasafunctionofreflectionangleisobservedintheexperiment.Bydoingatheoreticalsimulation.theconcentrationprofileofEratomscouldbederied.Itisshownthattheoriginallygrownδ-dopedErlayerchangesintoanexpionentiallydecayedfunctionduetotheErsegregation.Thetemperaturedependenceofthe1/edecaylengthindicatesthatthesegregationisakineticallylimitedprocess.Theactivationenergyisdeterminedtobe0.044±0.005eV.
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