Dependenceofdecamethylcyclopentasiloxane(DMCPS)organosilicondissociationonionizedenergyintheenergyrangeof25eVto70eVisinvestigatedbyusingaquadrupolemassspectrometry.Attheionizedenergybelow55eV,thedissociationofDMCPSisdominant.Astheionizedenergyisabove55eV,theDMCPSdissociationachievesthemaximumcrosssection,whilethefragmentsfromtheDMCPSdissociationcanfurtherdissociate,whichleadstoadifferentingredientoffragments.Atthelowerionizedenergyof25eV,themainfragmentsareSiOC_2H_5~+,SiCH~+,Si~+,O_2~+andCH_3~+ions,whichshowsanimportanteffectontheSiCOHlow-kfilmdeposition.
