光诱导MOCVD（Photo—MOCVD）技术的发展-中国期刊网

摘要 MOCVD是一种生长或外延薄膜的技术。将光引入外延过程，利用光的量子性，使反应的物理和化学过程得到促进，进而发展了一种新的化合物半导体薄膜制备技术，即光诱导MOCVD技术。本文综合分析了该技术的基本原理、实验装置、光源的分类和选择及该技术的实践应用，介绍了反应室结构的开发设计及光源的新进展。

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光诱导MOCVD（Photo—MOCVD）技术的发展