摘要
Thispaperpresentsthedesign,fabrication,andexperimentalcharacterizationofaperistalticmicropump.ThemicropumpiscomposedoftwolayersfabricatedfromPolydimethylsiloxane(PDMS)material.Thefirstlayerhasarectangularchannelandtwovalveseals.Threerectangularminilightweightpiezo-compositeactuatorsareintegratedinthesecondlayer,andusedasactuationparts.Twolayersarebonded,andcoveredbytwoPolymethylMethacrylate(PMMA)plates,whichhelpincreasethestiffnessofthemicropump.Amaximumflowrateof900μL·min-1andamaximumbackpressureof1.8kPaarerecordedwhenwaterisusedaspumpliquid.Wemeasuredthepowerconsumptionofthemicropump.Themicropumpisfoundtobeaprom-isingcandidateforbio-medicalapplicationduetoitsbio-compatibility,portability,bidirectionality,andsimpleeffectivedesign.
出版日期
2008年02月12日（中国期刊网平台首次上网日期，不代表论文的发表时间）
