摘要
Byusingthephysicalcharacteristicofthetitaniumwhenitissubliming,fourteentitaniumballsarefixedinthevacuumchambertoimprovethebackgroundofthewallofthevacuumchamberofHL-2A.Whenthefilamentsoftheballshave40-50Acurrent,temperaturesoftheballsisupto1200centigradeandtheballsbegintosublime.Thereforeinordertogetbetterparametersofplasma,wefabricatefourteenpowersuppliestoheattheballs.
出版日期
2003年01月11日(中国期刊网平台首次上网日期,不代表论文的发表时间)