ON THE CHARACTERIZATION OF METALLIC SUPERLATTICE STRUCTURES BY X

摘要 Tosolvetheproblemonthemicrostructuralcharacterizationofmetallicsuperlattices,takingtheNiFe/Cusuperlatticesasexample,weshowthatthesturcturesofmetallicsuperlatticescanbecharacterizedexactlybycombininglow-angleX-raydiffractionwithhigh-angleX-raydiffraction.First,wedetermineexactlythetotalfilmthicknessbyastraightforwardandprecisemethodbasedonamodifiedBragglawfromthesubsidiarymaximaaroundthelow-angleX-raydiffractionpeak.Then.bycombiningwiththesimulationofhigh-angleX-raydiffraction.weobtainthesturcturalparameterssuchasthesuperlatticeperiod,thesublayerandbufferthickness,Thischaracterizationprocedureisalsoapplicabletoothertypesofmetallicsuperlattices.

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ON THE CHARACTERIZATION OF METALLIC SUPERLATTICE STRUCTURES BY X—RAY DIFFRACTION

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ON THE CHARACTERIZATION OF METALLIC SUPERLATTICE STRUCTURES BY X—RAY DIFFRACTION

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