A comparison of emissive and cold floating probe techniques for electric potential measurements in rf inductive discharge-中国期刊网

摘要 Acoldfloatingprobemethodwascomparedwiththeemissivefloatingprobemethodintermsofalow-pressureradio-frequencyinductivedischarge.Thedependencesofdifferencebetweentheplasmapotentialandthefloatingpotentialontheelectrontemperature1-8eV,plasmadensity109-1012cm3andmagneticfield100-650Gwereobtained.Itwasdemonstratedthatthedifferencebetweenthepotentialsthatobtainedbythesetwomethodscandiffersignificantlyfromtheexpectedvalueof5.2kTe/eforargon.

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A comparison of emissive and cold floating probe techniques for electric potential measurements in rf inductive discharge

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A comparison of emissive and cold floating probe techniques for electric potential measurements in rf inductive discharge

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