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Low Concentration of CO Gas Sensor by Atomic Layer Deposition

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DOI kd2mrx5xj6/1469286

作者 Mehmet Demir;Ozlem Barin;Irmak Karaduman;Dilber Esra Yildiz;Selim Acar

机构地区不详

出处《物理科学与应用：英文版》 2014年8期

关键词气体传感器原子层沉积 CO分子低浓度二氧化钛操作温度

分类 [理学][物理]

出版日期 2014年08月18日（中国期刊网平台首次上网日期，不代表论文的发表时间）

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来源期刊

物理科学与应用：英文版

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相关关键词

气体传感器原子层沉积 CO分子低浓度二氧化钛操作温度

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