摘要
Inordertorealizetheplanargradientrefractiveindex(GRIN)microlenswhichisbaseduponporoussilicon(PSi)andfabricatedonsilicononinsulator(SOI),anovelanodizationmethodisusedbyapplyinglateralelectricfield.Themicrolenswithsmoothvariationoftheeffectiveopticalthicknessisachieved.Thelensistransparentintheinfraredregion,includingtheopticalcommunicationwindow(1.3μm
出版日期
2013年02月12日(中国期刊网平台首次上网日期,不代表论文的发表时间)